CD 600
Removal of molecular contamination layers from a surface
Cleaning of electronic circuitry prior to encapsulation, gluing, printing, to soldering
Cleaning prior to wire bonding of lead frames
Tray system, or Winding and guiding system (1 to 20 m/min)
Generator (40 kHz, 13,56 MHz, 2,45 GHz) and matching network
Number of electrode sets determines plasma zone
Primary or secundary plasma
Process control and data logging by PLC or PC