Hermetically encapsulated transducer made of PFA, to be mounted over the rotating substrate. In order to transmit the Megasonic energy there has to be always a liquid layer between the substrate surface and the active transducer bottom side when in operation.
The Megasonic energy is transmitted homogeneously with a uniform sound wave over the active transducer surface, of
app. 150 x 25 mm, right-angled on the substrate.
