√.Improving Wire Bonding
    √.Improving Solder Ball Attach
    √.Improving Flip Chip Underfill
    √.Improving Molding

    The Alpha Plasma System AL 76 Compact is the perfect all-rounder. This microwave plasma cleaner meets the full 360 degrees of today’s requirements in advanced chip packaging.

    The innovative system design and microwave coupling makes the AL 76 Compact to the most productive and versatile plasma system. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table set-up is included also rounding off the system configurations

    Process chamber: Aluminum
    Volume: 76 liters
    Chamber size: W 400 mm × D 490 mm × H 400 mm
    Chamber door: Drawer – type with viewing port
    Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts


    Vacuum pump:  vacuum pump combination
    Gas Channel
    Rotary table
    ECR set-up
    Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A
    Dimensions: W 1050 mm × D 800 mm × H 2020 mm (incl. light tower)