ALPHA PLASMA
AL76 Plasma Cleaner
For Wafer and Chip Packaging

Compact
Desktop
Compact
Desktop

Alpha Plasma AL 76 for chip packaging is a batch processing plasma cleaner. It has bigger chamber volume and have certain options for loading method on the processing chamber. This is to suit for the mass production use. It is a superb plasma cleaner to improve the wire bonding, solder ball attach, flip chip under fill and molding.

Process Aluminium
Microwave Power 2.45GHz adjustable between 50 to 1200 watts
System Dimension W1050 x H2020 (with light tower) x D800 (mm)
Chamber Dimension W400 x H400 x D490 (mm)
Volume 78 litres
Loading

Electron Cyclotron Resonance (optional)

Wafer Cassette (up to 12” wafer)

Rotating Table (optional)

 

ECR Loading
Wafer Loading
Rotating Table Loading