ALPHA PLASMAAL76 Plasma Cleaner For Wafer and Chip Packaging
Alpha Plasma AL 76 for chip packaging is a batch processing plasma cleaner. It has bigger chamber volume and have certain options for loading method on the processing chamber. This is to suit for the mass production use. It is a superb plasma cleaner to improve the wire bonding, solder ball attach, flip chip under fill and molding.
|Microwave Power||2.45GHz adjustable between 50 to 1200 watts|
|System Dimension||W1050 x H2020 (with light tower) x D800 (mm)|
|Chamber Dimension||W400 x H400 x D490 (mm)|
Electron Cyclotron Resonance (optional)
Wafer Cassette (up to 12” wafer)
Rotating Table (optional)