ALPHA PLASMAASTRO SERIESFully Automatic System
Astro 96 is a fully automated strip microwave plasma system. It design for the mass production for the strips plasma cleaning. Astro 96 has a robust loader and unloader to handle sensitive substrate with jam free solution. With this microwave plasma, it will improve wire bonding, flip chip underfill and molding for advance packaging process of IC manufacturing.
|Microwave Power||2.45GHz, 2 sets of microwave generator (magnetron) adjustable between 50 to 600 watts each air cooled|
|System Dimension||W1635 x H2265 (with light tower) x D1405 (mm)|
|Chamber Dimension||W330 x H120 x D420 (mm)|
|Loading||Fully automatic gripper with force sensor|
|Lead frame In/Out
– Lead frame In/Out for same magazine and same slot (Standard)
– Lead frame In/Out for different magazine and same/different slot (Option)
Jam detection system with adjustable push force to prevent lead frames from damaging.